A trichlorosilane synthesis furnace cooling system and trichlorosilane synthesis furnace-Iota

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Service > A trichlorosilane synthesis furnace cooling system and trichlorosilane synthesis furnace

A trichlorosilane synthesis furnace cooling system and trichlorosilane synthesis furnace

The utility model discloses a trichlorosilane synthesis furnace cooling system, including: cooling water inlet pipe, above has the opening of the steam outlet pipe, filled with inert gas inert gas sleeve and the pressure sensing device; the cooling water inlet pipe body is located in the steam pipe; the water cooling water inlet from the out out of the side wall of the steam pipe; inert gas sleeve in the a steam pipe external; on the outer wall of the inert gas casing arranged in the air inlet and the pressure sensing device. The utility model discloses a trichlorosilane synthesis furnace. Using the utility model discloses the trichlorosilane synthetic furnace cooling system and the trichlorosilane synthetic furnace, can prevent steam tube is worn out, and bushing in the inert gas was worn out and so on, can through the observation of pressure induction device readings found in time, improve the safety of trichloro hydrogen silicon synthetic furnace equipment.

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