Trichlorosilane vaporization device-Iota

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News > Dynamic industry > Trichlorosilane vaporization device

Trichlorosilane vaporization device

The invention relates to the polysilicon production unit, specifically that involves a trichlorosilane vaporization device, which belongs to the technical field of polysilicon production. The invention of trichlorosilane vaporization device comprises evaporator, a hydrogen supply pipe, trichlorosilane liquid conveying pipe, a trichlorosilane gas conveying pipe, a mixed gas transmission pipe, a mixing device, the lower end of the evaporator is provided with trichlorosilane liquid inlet, the upper end is provided with trichlorosilane gas outlet; trichlorosilane liquid inlet and trichlorosilane liquid conveying pipe is communicated with a; trichlorosilane liquid conveying pipe, a hydrogen conveying pipe are respectively provided with a meter; mixer respectively with hydrogen gas conveying pipe, trichlorosilane gas transmission pipe and a mixed gas conveying pipe is communicated. Using the invention of trichlorosilane vaporization device of trichlorosilane vaporization and can get stable ratio, uniform mixing of gas mixing; more uniform mixing of raw materials, have to reduction furnace reduction reaction of silicon rod of uniform growth and production of grain appearance quality better.

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